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Articles of Vol. 1, 1987
Preliminary
Investigation of the Contamination of Semiconductor Process Pump Oil
by Halogenated Organic Compounds
Steven P. Levine - University of
Michigan, School of Public Health , Christopher Robert Strang - AT&T
Technologies
(SSA Journal - January 1987 pp. 36 -
37)
[abstract]Full Text available for Members Only
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