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Articles of Vol. 14, 2000

Treating Copper from CMP Waste Using Photocatalysis
Denise Noble (SSA Journal Volume 14 Number 1 - Spring 2000 pp. 9 - 15)
[abstract]
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Alternative Chemistries for Chamber Cleans to Reduce Perfluorocompound (PFC) Emissions
Nicole M. Pauly-Hyslop - Dept of Chemical Engineering, Univ of Texas at Austin (SSA Journal Volume 14 Number 1 - Spring 2000 pp. 17 - 25)
[abstract]
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The Use of Supercritical Fluids in the Semiconductor Industry
Georgia Guenther - Arizona State University, Candidate, Masters of Science in Technology (SSA Journal Volume 14 Number 1 - Spring 2000 pp. 27 - 34)
[abstract]
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Incident Recovery Some Old Lessons Re-Learned During the 1999 Taiwan Earthquake
Bruce Swales - Relectronic-Remech (S) Pte Ltd, Australasian/Asian Group; Singapore, Robert B. Barnes - Robert B. Barnes Associates, Inc. (SSA Journal Volume 14 Number 2 - Summer 2000 pp. 13 - 21)
[abstract]
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Hexafluorine for Emergent Decontamination of Hydrofluoric Acid Eye/Skin Splashes
J. Nehles - Manesmann Hoesch Praziorohr, Remschied, Germany, H. Hall - Toxicology Consulting and Medical Translating Services J. Blomet - Laboratoire PREVOR, Valmondois, France M. Gross - R. Woeste and Co., Velbert, Germany (SSA Journal Volume 14 Number 2 - Summer 2000 pp. 30 - 33)
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Review Article: You've Submitted Your RMP - Now What?
Joseph Zupan, PE - Zephyr Environmental Corporation (SSA Journal Volume 14 Number 2 - Summer 2000 pp. 34 - 35)
[abstract]
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Practical Considerations for Designing a "Firesafe" Tool
Frederick W. Kern - IBM Microelectronics , Alastair R. Brown - Rushbrook Consultants (SSA Journal Volume 14 Number 3 - Autumn 2000 pp. 9 - 16)
[abstract]
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Building and Fire Codes Past, Present, Future
Mary Eriksen-Rattan - Eriksen-Rattan Associates Inc., Patrick A. McLauglin - McLaughlin & Associates (SSA Journal Volume 14 Number 3 - Autumn 2000 pp. 17 - 20)
[abstract]
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Wafer Carriers and Fire Safety
, , M.R. Mannex - FM Global (SSA Journal Volume 14 Number 3 - Autumn 2000 pp. 21 - 25)
[abstract]
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An Update on Codes and Standards Affecting the Semiconductor Industry
David A. Quadrini, Sr. - Industry Consultant, Roger Benson - Factory Mutual Global (SSA Journal Volume 14 Number 3 - Autumn 2000 pp. 31 - 38)
[abstract]
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Development of a New Small-Scale Test for Determining the Combustibility of Plastics Used in Semiconductor Tools
Pravinray D. Gandhi, Ph.D., Robert G. Backstrom, and Jane I. Lataille, Underwriters Laboratories (SSA Journal Volume 14 Number 3 - Autumn 2000 pp. 39 - 49)
[abstract]
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Isobutylene Proves Successful in a Unique Process Tool Tracer Gas Test
Daniel Wilkowsky, P.E. - IDC, Daniel W. Hernandez, M.P.H., C.I.H. - Toxichem Management Systems, Inc. (SSA Journal Volume 14 Number 4 - Winter 2000 pp. 21 - 25)
[abstract]
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Monitoring Arsine in the Semiconductor Industry
Margaret E. O'Brien - Texas Instruments Incorporated (SSA Journal Volume 14 Number 4 - Winter 2000 pp. 31 - 35)
[abstract]
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Evaluation of Gas Monitoring Technologies for Detection of Boron Trifluoride Leak in a Semiconductor Fab Environment
Joseph B. Barsky, C.I.H., C.S.P. - LSI Logic Corporation, Harish K. Goyal, P.E. - TGO Solutions (SSA Journal Volume 14 Number 4 - Winter 2000 pp. 36 - 40)
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