Note: Proceedings articles appears as links below each presentation where available.


Program

Daily Grids:

May 16 (Monday): Professional Development Courses (PDC)



Morning - 8:00 am - 12 Noon
PDC #1:   Fundamentals and EHS Challenges of Semiconductor Manufacturing (S. Creighton)
- Full Day -
PCD #2: Vacuum and cryogen safety concerns. (R. Shrouf)
- Half day morning -

Afternoon - 1:00 pm - 5:00 pm

PDC #1:   Continues from morning
PCD #3: Silane Safety (E. Ngai)
- Half day afternoon -
6:00 -8:00 pm: PDC #4: Ethics and ESH


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Schedule Grid


May 17 (Tuesday)

08:00
Opening Ceremony and Awards Presentation
[Proceedings article (.pdf)]

Elizabeth Aton - SSA/SESHA History Project
[Proceedings article (.pdf)]
09:30
Break - Vendor exhibiting and networking time
10:00
SIA Regional Updates
SIA, ESIA, TSIA, CSIA, KSIA, JSIA
Proceedings articles (.pdf):
ESIA Update
JSIA Update
KSIA Update
TSIA Update
[Proceedings article (.pdf)]
11:00
David Isaacs - SIA
Global Semiconductor Industry - Looking Forward
[Proceedings article (.pdf)]
12:00
Lunch Break - Exhibit Hall - Vendor exhibiting and networking time
13:45 Global Chem Regs
Environmental Regulatory Developments in the EU
S.Harte
[Proceedings article (.pdf)]
13:45 Safety-IH
Evaluation of Potential Cytotoxicity of Nanoscale Inorganic Oxides Utilized in Semiconductor Manufacturing
R.Sierra-Alvarez, L.Otero, C.Garcia, Antonia Luna-Velasco, Angel Cobo, Jim A Field
13:45 GHG
Compliance Techniques for new Greenhouse Gas Regulations
T.Higgs
[Proceedings article (.pdf)]
14:30 Global Chem Regs
JAMP Activity Update
S.Ibuka
[Proceedings article (.pdf)]
14:30 Safety-IH
Preventing musculoskeletal discomforts for a healthy workplace
R.Lin
[Proceedings article (.pdf)]
14:30 GHG
PFC Stack Emissions Testing
S.Inloes
[Proceedings article (.pdf)]
15:15
Break - Exhibit Hall - Vendor exhibiting and networking time
15:45 Global Chem Regs
Decontamination and decommissioning of equipment: Roundtable Discssion
T.Yeakley
[Proceedings article (.pdf)]
15:45 Safety-IH
Tetramethylammonium hydroxide (TMAH): Toxicity and Methods to Reduce Risk in the Workplace
K.DiZio, R.Melville, E.Timlin
[Proceedings article (.pdf)]
15:45 GHG
Developing a Fluorinated Greenhouse Gas Stack Testing Method Using FTIR
T.Gilliland, C.Laush
[Proceedings article (.pdf)]
16:30 Safety-IH
The Integration of a Toxic Gas Monitoring System into the Building Fire Alarm System
J.Sweeney
[Proceedings article (.pdf)]
16:30 GHG
Title: Staying up to date with the EPA’s Mandatory Reporting for Greenhouse Gases and California’s AB32- Regulations as they relate to Semiconductor and Related Devices.
J.Cook
[Proceedings article (.pdf)]

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May 18 (Wednesday)

08:30
Keynote Presentation: Ic Insights
Trevor Yancey
[Proceedings article (.pdf)]
09:30
Break - Exhibit Hall - Vendor exhibiting and networking time
10:00 Safety/IH
Safety and Health Committee
x.qiao, x.wang
[Proceedings article (.pdf)]
10:00 CSR
The Business Case for Integrating ESG
G.Niekerk, S. Fallender, E.Zeller
[Proceedings article (.pdf)]
10:00 PV / Solar Manufacturing EHS
SF6 Massive-Scale Decomposition Technology and Clean Development Mechanism Project in TFT-LCD Industry, South Korea.
J.Choi
[Proceedings article (.pdf)]
10:00 Abatement Strategies
Point -of -Use ammonium compounds removal - keeping exhaust emission clear
A.Tsou
[Proceedings article (.pdf)]
10:45 Safety/IH
A Study On Odor Reduction for Semiconductor Industry
N.Park, S.Kim, C.Shin
[Proceedings article (.pdf)]
10:45 CSR
Implementation Strategy for Corporate Social Responsibility (CSR) at ON Semiconductor
K.Evans, T.McCarley, P.Amorin
[Proceedings article (.pdf)]
10:45 PV / Solar Manufacturing EHS
PV Industry - Overview of EHS Considerations
W.Cyrs, K.Krause, A.McIntyre
10:45 Abatement Strategies
The cooperation to reduce SF6 emission between the electricity and Magnesium industries
J.LU
[Proceedings article (.pdf)]
11:30
Lunch Break - Exhibit Hall - Vendor exhibiting and networking time
13:00 Emerging Codes
Air Permitting Wafer Fabs
M.Sherer
[Proceedings article (.pdf)]
13:00 Waste Minimization
Recovering Semiconductor Manufacturing Materials
R.Parker, B.Atkinson, J.Bradshaw
[Proceedings article (.pdf)]
13:00 PV / Solar Manufacturing EHS
How to improve the LED ESH issues and GHG emission reduction in Taiwan
J.Cheng, J.LU, Y.Peng
[Proceedings article (.pdf)]
13:00 Abatement Strategies
Lessons Learned From Measuring Destruction or Removal Efficiencies (DRE) of Fluorinated Greenhouse Gases Across Point-of-Use Abatement Devices
B.Benaway*, S.Hall
[Proceedings article (.pdf)]
13:45 Emerging Codes
Complying with 1-Hour NO2 NAAQS
B.Davis
[Proceedings article (.pdf)]
13:45 Waste Minimization
Improving the End-of-Life for Electronic Materials via Sustainable Recycling
M.Korzenski, P.Jiang
[Proceedings article (.pdf)]
13:45 PV / Solar Manufacturing EHS
Sustainable Energy Solutions Through Product Life Cycle Management
P.Sinha
[Proceedings article (.pdf)]
13:45 Abatement Strategies
DRE Measurement of POU Scrubber through Applying the Dilution Factor of PFCs
C.Oh, S.Ko, Y.Jeong
[Proceedings article (.pdf)]
14:30 Emerging Codes
Implementing ISO 13849-1; An Equipment Manufacture\\\'s Perspective
M.Fessler
[Proceedings article (.pdf)]
14:30 Waste Minimization
Creating the Green Fab standard labeling for Taiwan Semiconductor Industries
J.LU, J.Cheng, F.Shu
[Proceedings article (.pdf)]
14:30 PV / Solar Manufacturing EHS
GHG Reporting for the Electronics Industry - Determination of Reporting Applicability
D.Cotter, PE
[Proceedings article (.pdf)]
14:30 Abatement Strategies
Comparison Study of Fourier Transform Infrared (FTIR) and Quadrupole Mass Spectroscopy (QMS) for Point-of-Use (POU) Abatement System Effluent Flow Determination
S.Hall*, B.Benaway
[Proceedings article (.pdf)]
15:15
Break - Exhibit Hall - Vendor exhibiting and networking time
15:45 Emerging Codes
Fire Safety Compliance - Why Are My Fire Safety Systems Not SEMI S2 Compliant?
M.Wyman
[Proceedings article (.pdf)]
15:45 Waste Minimization
Research of reduction carbon dioxide emission by applying microalgae biotech in semiconductor factory
C.Ching-Lung
[Proceedings article (.pdf)]
15:45 Disaster Preparedness Roundtable
Losses in the Semiconductor Industry – Case Studies and Lessons Learned
W.Acorn
16:30 Emerging Codes
Around the world chemical tour
D.Graunke, M.Majors
[Proceedings article (.pdf)]
16:30 Waste Minimization
Environmentally-Benign In-Line Cleaning Solutions for Advanced Semiconductor Manufacturing
T.Chen, T.Hogan, M.Korzenski
[Proceedings article (.pdf)]

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May 19 (Thursday)

08:30
Keynote Presentation
Dr. Kevin Dooley - ASU
Towards harmonization of measuring and reporting product sustainability

[Proceedings article (.pdf)]
09:30
Break - Exhibit Hall - Networking time
10:00 CSR
Leveraging existing SEMI guidelines to drive leading-edge supplier environmental, health, safety and sustainability programs
A.McIntyre, D.Firu
[Proceedings article (.pdf)]
10:00 Risk Management
Safety of personnel working near track for \\\"Overhead transportion vehicle\\\"
S.Ibuka
[Proceedings article (.pdf)]
10:00 Safety/IH
Mitigation of Hazards Associated with Disilane in Semiconductor Manufacturing
D.Westmoreland
[Proceedings article (.pdf)]
10:45 CSR
Building Information Modeling: A Process to Mitigate Risk, Improve Project Delivery, and integrate Sustainability into Semiconductor Facilities
A.Chasey
[Proceedings article (.pdf)]
10:45 Risk Management
Integrated e-ESH System
F.Hsu
[Proceedings article (.pdf)]
10:45 Safety/IH
Electronic Industry Code of Conduct
S.Viera
[Proceedings article (.pdf)]
11:30
Lunch Break - Presentation on current abatement technologies
13:00 Energy Conservation
Practical Application of SEMI S23
C.Evanston
[Proceedings article (.pdf)]
13:00 Risk Management
Safety Analytics: The Future of Workforce Safety and Health
T.Hohn, D.Duden
13:00 GHG
PCS PIRANHA plasma abatement system: Update of evaluation on 300mm Etch process
E.Kopatzki, J.Guerin
[Proceedings article (.pdf)]
13:45 Energy Conservation
Energy savings by air coil efficiency improvement
S.Deschenes, R.Bernard, L.Galbreath
[Proceedings article (.pdf)]
13:45 Risk Management
Surface Contamination of Dummy Wafer and its Health Effect in Semiconductor Manufacturing Industry
K.Choi
[Proceedings article (.pdf)]
13:45 GHG
Guideline for GHG Emission Measurement and Management
M.Kagino
[Proceedings article (.pdf)]
14:30 Energy Conservation
Save Energy and Reduction of Greenhouse Gas by Energy Recovery System
J.Park, M.Lee, Y.Jeong
[Proceedings article (.pdf)]
14:30 Risk Management
Prevention Maintenance Protection and Hazards Exposure Control of Thermal Type Local Scrubber MAT
H.Tsou
[Proceedings article (.pdf)]
14:30 GHG
Global warming evaluation of Chamber cleaning gases by new indicators, CEWN and CETN
A.Sekiya, S.Okamoto
[Proceedings article (.pdf)]
15:15
Break - Networking time
15:45
Closing Ceremony SESHA/IHTESH
[Proceedings article (.pdf)]
17:00
END

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May 20 (Friday): Professional Development Courses (PDC)



Morning - 8:00 am - 12 Noon
PDC #5:   Fundamentals and EHS Challenges of PV Manufacturing (A. McIntyre)
- Full Day -
PCD #6:   Exhaust Gas Management and Environmental CharacterizationVacuum and cryogen safety concerns. (M. Sherer)
- Full Day -

Lunch Break
Afternoon - 1:00 pm - 5:00 pm

PDC #5:   Continues from morning
PCD #6:   Continues from morning


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