SESHA 2019 Symposium Abstract

Applications Manager

Josh Ratchford
(Edwards Vacuum, Hillsboro, OR)

Gas emission reduction strategies include process optimization, substitution, abatement, and recycling. Gas recycling is technically possible, however, the decision whether or not to recycle gases depends on a number of factors: gas availability, quality of the recycled gas, cost, environmental benefits, overall safety implications, etc. Examples of gas recycling in the semiconductor industry will be presented that show the value recycling offers to reduce gas emissions.